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An instrument that uses an electron beam with a very short wavelength as an electron light source, irradiates a very thin sample with a high-speed, concentrated electron beam, and collects transmitted electrons to pass through an electromagnetic lens for multi-stage magnification and imaging. It is used to observe the microstructure of materials, such as diffraction of single crystal and polycrystalline; The electron beam passing through the sample carries the structural information inside the sample. After focusing and primary magnification of the objective lens, it enters the lower lens for comprehensive magnification imaging. Through the high-resolution imaging technology of electron microscope, the information about the lattice structure of the substrate and the film and the information about the interface structure can be obtained through the selected area diffraction pattern (SAED).
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